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Optical Engineering

Selected applications of photothermal and photoluminescence heterodyne techniques for process control in silicon wafer manufacturing
Author(s): Andreas Ehlert; Michael Kerstan; Holger Lundt; Anton Huber; Dieter Helmreich; Hans-Dieter Geiler; Harald Karge; Matthias Wagner
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Paper Details

Date Published: 1 February 1997
PDF: 13 pages
Opt. Eng. 36(2) doi: 10.1117/1.601216
Published in: Optical Engineering Volume 36, Issue 2
Show Author Affiliations
Andreas Ehlert, Wacker Siltronic AG (Germany)
Michael Kerstan, Wacker Chemitronic GmbH (Germany)
Holger Lundt, Wacker-Chemitronic GmbH (Germany)
Anton Huber, Wacker Siltronic AG (Germany)
Dieter Helmreich, Wacker Siltronic AG (Germany)
Hans-Dieter Geiler, Jena Wave Engineering & Consulting (Germany)
Harald Karge, JenaWave Engineering & Consulting (Germany)
Matthias Wagner, JenaWave Engineering & Consulting (Germany)

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