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Optical Engineering

Angle measurement using total-internal-reflection heterodyne interferometry
Author(s): Ming-Horng Chiu; Der-Chin Su
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Paper Abstract

A new optical method for angle measurement based on totalinternal- reflection heterodyne interferometry is presented. In this method, heterodyne interferometry is applied to measure the phase difference between s and p polarization states at total internal reflection. This phase difference depends on the angle of incidence. Hence, smallangle measurement can be performed only by evaluating this phase difference. The validity of the method is demonstrated, and it has a measurement range of 10 deg. Its resolution depends on the angle of incidence; the best resolution is 8×10-5 deg.

Paper Details

Date Published: 1 June 1997
PDF: 4 pages
Opt. Eng. 36(6) doi: 10.1117/1.601200
Published in: Optical Engineering Volume 36, Issue 6
Show Author Affiliations
Ming-Horng Chiu, National Chiao Tung Univ. (Taiwan)
Der-Chin Su, National Chiao Tung Univ. (Taiwan)


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