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Optical Engineering

Line-size effects on ultraviolet reflectance spectra
Author(s): David H. Ziger; Thomas Evans Adams; Joseph G. Garofalo
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Paper Details

Date Published: 1 January 1997
PDF: 8 pages
Opt. Eng. 36(1) doi: 10.1117/1.601167
Published in: Optical Engineering Volume 36, Issue 1
Show Author Affiliations
David H. Ziger, VLSI Technology, Inc. (United States)
Thomas Evans Adams, AT&T Bell Labs. (United States)
Joseph G. Garofalo, Lucent Technologies (United States)

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