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Optical Engineering

Chemical vapor deposited silicon carbide mirrors for extreme ultraviolet applications
Author(s): Ritva A. M. Keski-Kuha; John F. Osantowski; Douglas B. Leviton; Timo T. Saha; Geraldine A. Wright; Rene A. Boucarut; Charles M. Fleetwood; Timothy J. Madison
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Paper Details

Date Published: 1 January 1997
PDF: 5 pages
Opt. Eng. 36(1) doi: 10.1117/1.601128
Published in: Optical Engineering Volume 36, Issue 1
Show Author Affiliations
Ritva A. M. Keski-Kuha, NASA Goddard Space Flight Ctr. (United States)
John F. Osantowski, NASA Goddard Space Flight Ctr. (United States)
Douglas B. Leviton, NASA Goddard Space Flight Ctr. (United States)
Timo T. Saha, NASA Goddard Space Flight Ctr. (United States)
Geraldine A. Wright, NASA Goddard Space Flight Ctr. (United States)
Rene A. Boucarut, NASA Goddard Space Flight Ctr. (United States)
Charles M. Fleetwood, NASA Goddard Space Flight Ctr. (United States)
Timothy J. Madison, NASA Goddard Space Flight Ctr. (United States)


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