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Optical Engineering

Optical flat surfaces: direct interferometric measurements of small-scale irregularities
Author(s): Parameswaran Hariharan
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Paper Abstract

Some applications of optical surfaces place very stringent limits on small-scale surface irregularities, such as ripples. A method that can be used to make direct interferometric measurements of such smallscale irregularities is described.

Paper Details

Date Published: 1 November 1996
PDF: 2 pages
Opt. Eng. 35(11) doi: 10.1117/1.601065
Published in: Optical Engineering Volume 35, Issue 11
Show Author Affiliations
Parameswaran Hariharan, CSIRO (Australia)

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