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Optical Engineering

Experimental study of waveguide grating couplers with parallelogramic tooth profiles
Author(s): Ming Li; Stephen J. Sheard
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Paper Abstract

The fabrication process of waveguide grating couplers with parallelogramic tooth profiles is described, using a novel reactive-ion etching (RIE) geometry to generate oblique anisotropic etching. The blazing effect of nonresonant parallelogramic grating couplers is demonstrated experimentally, with nearly 90% radiation directionality measured. The radiation factors of the grating couplers are also measured, and comparisons with simulated results show that the measured value is lower than that predicted theoretically. This is attributed to the deviation of the grating tooth profile from the ideal parallelogramic shape.

Paper Details

Date Published: 1 November 1996
PDF: 6 pages
Opt. Eng. 35(11) doi: 10.1117/1.601047
Published in: Optical Engineering Volume 35, Issue 11
Show Author Affiliations
Ming Li, Chalmers Univ. of Technology (Sweden)
Stephen J. Sheard, Univ. of Oxford (United Kingdom)

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