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Optical Engineering

Microscopic interferometer for surface roughness measurement
Author(s): Zhihua Ding; Guiying Wang; ZhiJiang Wang
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Paper Details

Date Published: 1 October 1996
PDF: 6 pages
Opt. Eng. 35(10) doi: 10.1117/1.600979
Published in: Optical Engineering Volume 35, Issue 10
Show Author Affiliations
Zhihua Ding, Shanghai Institute of Optics and Fine Mechanics (China)
Guiying Wang, Shanghai Institute of Optics and Fine Mechanics (China)
ZhiJiang Wang, Shanghai Institute of Optics and Fine Mechanics (United States)


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