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Optical Engineering

Active phase-shifting interferometers for shape and deformation measurements
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Paper Details

Date Published: 1 October 1996
PDF: 8 pages
Opt. Eng. 35(10) doi: 10.1117/1.600956
Published in: Optical Engineering Volume 35, Issue 10
Show Author Affiliations
Ichirou Yamaguchi, RIKEN--Institute of Physical and Chemical Research (Japan)
Jiyuan Liu, The Institute of Physical and Chemical Research (RIKEN) (United States)
Jun-ichi Kato, RIKEN--Institute of Physical and Chemical Research (Japan)


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