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Optical Engineering

SLITS simulator: modeling and simulation of e-beam/deep-ultraviolet exposure and silylation
Author(s): Declan McDonagh; Khalil I. Arshak; Arousian Arshak; Jules Braddell
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Paper Details

Date Published: 1 January 1996
PDF: 7 pages
Opt. Eng. 35(1) doi: 10.1117/1.600931
Published in: Optical Engineering Volume 35, Issue 1
Show Author Affiliations
Declan McDonagh, Univ. of Limerick (United States)
Khalil I. Arshak, Univ. of Limerick (Ireland)
Arousian Arshak, Univ. of Limerick (Ireland)
Jules Braddell, N.M.R.C. (Ireland)


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