Share Email Print

Optical Engineering

Touchless interferometric dimension comparator
Author(s): Marek Dobosz; Hirokazu Matsumoto; Shige Iwasaki
Format Member Price Non-Member Price
PDF $20.00 $25.00

Paper Details

Date Published: 1 February 1996
PDF: 6 pages
Opt. Eng. 35(2) doi: 10.1117/1.600920
Published in: Optical Engineering Volume 35, Issue 2
Show Author Affiliations
Marek Dobosz, Warsaw Univ. of Technology (Poland)
Hirokazu Matsumoto, National Research Lab. of Metrology (Japan)
Shige Iwasaki, National Research Lab. of Metrology (Japan)

© SPIE. Terms of Use
Back to Top