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Optical Engineering

Measurement of x-ray telescope mirrors using a vertical scanning long trace profiler
Author(s): Haizhang Li; Xiaodan Li; Manfred W. Grindel; Peter Z. Takacs
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Paper Abstract

A prototype of a vertical scanning long trace profiler was used to measure the surface of a polished x-ray telescope mandrel in a vertical configuration and provides a 3-D view of the surface figure and slope errors. The design of the prototype system is described and experimental results are presented. Results indicate that the prototype instrument is capable of an absolute height measurement accuracy of about 50 nm with a repeatability of better than 20 nm, and a slope measurement accuracy of about 1 microradian.

Paper Details

Date Published: 1 February 1996
PDF: 9 pages
Opt. Eng. 35(2) doi: 10.1117/1.600900
Published in: Optical Engineering Volume 35, Issue 2
Show Author Affiliations
Haizhang Li, Continental Optical Co. (United States)
Xiaodan Li, Continental Optical Corp. (United States)
Manfred W. Grindel, Continental Optical Corp. (United States)
Peter Z. Takacs, Brookhaven National Lab. (United States)

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