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Optical Engineering

Characterization of homogeneous and inhomogeneous Si-based optical coatings deposited in dual-frequency plasma
Author(s): Daniel Poitras; Pierre Leroux; Jolanta Ewa Klemberg-Sapieha; Subhash C. Gujrathi; Ludvik Martinu
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Paper Details

Date Published: 1 September 1996
PDF: 7 pages
Opt. Eng. 35(9) doi: 10.1117/1.600833
Published in: Optical Engineering Volume 35, Issue 9
Show Author Affiliations
Daniel Poitras, Ecole Polytechnique de Montreal (Canada)
Pierre Leroux, MicroPhotonics Inc. (United States)
Jolanta Ewa Klemberg-Sapieha, Ecole Polytechnique de Montreal (Canada)
Subhash C. Gujrathi, Univ. de Montreal (Canada)
Ludvik Martinu, Ecole Polytechnique de Montreal (Canada)

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