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Optical Engineering

Sensitivity-variable moire topography with a phase shift method
Author(s): Tetsuya Matsumoto; Yoichi Kitagawa; Takumi Minemoto
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Paper Abstract

We propose a projection moire´ topography with a phase shift method for measuring the fine profile of an object. In this method, a set of interference fringes made using a Mach-Zehnder interferometer and a dove prism is projected on an object surface to generate moire´ fringes. The interval between the moire´ fringes can be easily changed in a range of 160 to 300 µm and we can realize sensitivity-variable moire´ contouring. Also, the phases of the moire´ -fringe pattern are easily changed by shifting one of the interference fringe patterns and the depth at each point on the object are computed with a high accuracy from the several moire´ -fringe patterns with different phases. Although the interferometer is used in the system, the setup is robust against vibrations.

Paper Details

Date Published: 1 June 1996
PDF: 7 pages
Opt. Eng. 35(6) doi: 10.1117/1.600759
Published in: Optical Engineering Volume 35, Issue 6
Show Author Affiliations
Tetsuya Matsumoto, Hyogo Prefectural Institute of Industrial Research (Japan)
Yoichi Kitagawa, Hyogo Prefectural Institute of Industrial Research (Japan)
Takumi Minemoto, Kobe Univ. (Japan)

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