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Optical Engineering

Design of a light scatterometer for the measurement of small angle scattering
Author(s): Haiming Wang; Orestes Nicholas Stavroudis
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Paper Details

Date Published: 1 April 1996
PDF: 5 pages
Opt. Eng. 35(4) doi: 10.1117/1.600711
Published in: Optical Engineering Volume 35, Issue 4
Show Author Affiliations
Haiming Wang, Centro de Investigaciones en Optica, AC (United States)
Orestes Nicholas Stavroudis, Centro de Investigaciones en Optica (United States)


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