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Optical Engineering

Design of a light scatterometer for the measurement of small angle scattering
Author(s): Haiming Wang; Orestes Nicholas Stavroudis
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Paper Abstract

An instrument is designed to measure the intensity distribution of light scattered from optical surfaces. It uses two photodiodes, one to collect specularly reflected light and the other to record scattered light. This configuration enables us to measure both the reflected and scattered light intensities within a dynamic range over seven decades without introducing neutral density filters. The signal-to-noise ratio of the instrument is also improved in comparison with the single photodetector configuration. The instrument is capable of measuring scattering as close as 0.05 deg to the specularly reflected beam.

Paper Details

Date Published: 1 April 1996
PDF: 5 pages
Opt. Eng. 35(4) doi: 10.1117/1.600711
Published in: Optical Engineering Volume 35, Issue 4
Show Author Affiliations
Haiming Wang, Centro de Investigaciones en Optica, AC (United States)
Orestes Nicholas Stavroudis, Centro de Investigaciones en Optica (United States)

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