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Optical Engineering

New diffractive beam shaper generated with the aid of e-beam lithography
Author(s): Michael A. Golub; Michael Rudolf Duparre; Ernst-Bernhard Kley; Richard M. Kowarschik; Barbara Luedge; Werner Rockstroh; Hans-Joerg Fuchs
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Paper Abstract

A diffractive optical element has been fabricated which converts a Gaussian CO2-laser beam into a flat-top rectangle. This was accomplished by enhanced photolithographic technology with e-beam generated masks. Experimental patterns of the shaped intensity for a single-mode CO2 laser are presented.

Paper Details

Date Published: 1 May 1996
PDF: 7 pages
Opt. Eng. 35(5) doi: 10.1117/1.600697
Published in: Optical Engineering Volume 35, Issue 5
Show Author Affiliations
Michael A. Golub, Image Processing Systems Institute (Israel)
Michael Rudolf Duparre, Univ. Jena (Germany)
Ernst-Bernhard Kley, Friedrich-Schiller-Univ. Jena (Germany)
Richard M. Kowarschik, Univ. Jena (Germany)
Barbara Luedge, Univ. Jena (Germany)
Werner Rockstroh, Univ. of Jena (Germany)
Hans-Joerg Fuchs, Friedrich-Schiller-Univ. Jena (Germany)


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