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Optical Engineering

Modeling of light scattering by submicrometer spherical particles on silicon and oxidized silicon surfaces
Author(s): Mitchell L. Liswith; Edward J. Bawolek; E. Dan Hirleman
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Paper Details

Date Published: 1 March 1996
PDF: 12 pages
Opt. Eng. 35(3) doi: 10.1117/1.600664
Published in: Optical Engineering Volume 35, Issue 3
Show Author Affiliations
Mitchell L. Liswith, Intel Corp. (United States)
Edward J. Bawolek, Arizona State Univ. (United States)
E. Dan Hirleman, Arizona State Univ. (United States)

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