Optical EngineeringChecking-up of optical graduated rules by laser interferometry
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The main aspects related to the operating principle, design, and implementation of high-productivity equipment for checking-up the graduation accuracy of optical graduated rules used as a length reference in optical measuring instruments for precision machine tools are presented. The graduation error checking-up is done with a Michelson interferometer as a length transducer. The instrument operation is managed by a computer, which controls the equipment, data acquisition, and processing. The evaluation is performed for rule lengths from 100 to 3000 mm, with a checking-up error < 2 ?m/m. The checking-up time is about 15 min for a 1000-mm rule, with averaging over four measurements.