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Optical Engineering

Large-aperture high-accuracy phase-shifting digital flat interferometer
Author(s): Jinbang Chen; Dezhen Song; Rihong Zhu; Qingyun Wang; Lei Chen; Daojiong Chen
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Paper Abstract

A large-aperture high-accuracy phase-shifting digital flat interferometer that is a combination of optics, mechanics, electricity, and algorithm is described. The aperture size is 250 mm and a liquid surface is used as an absolute flat to eliminate system error. The accuracy is better than ?/50 (?50.6328 µm, peak-to-valley value). The tested aperture can be enlarged to 500 mm. This interferometer has been used as an optical flat standard instrument for China. The optical interferometer, phase shifter, and calibration of precision are described.

Paper Details

Date Published: 1 July 1996
PDF: 7 pages
Opt. Eng. 35(7) doi: 10.1117/1.600627
Published in: Optical Engineering Volume 35, Issue 7
Show Author Affiliations
Jinbang Chen, Nanjing Univ. of Technology (China)
Dezhen Song, Nanjing Univ. of Science and Technology (China)
Rihong Zhu, Nanjing Univ. of Technology (China)
Qingyun Wang, Nanjing Univ. of Science & Technology (China)
Lei Chen, Nanjing Univ. of Science & Technology (China)
Daojiong Chen, East China Institute of Technology (China)


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