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Journal of Micro/Nanolithography, MEMS, and MOEMS

Controllable fabrication of enclosed micro/nanochannels via polymethyl methacrylate pattern as sacrificial template and capillary effect
Author(s): Yunqiao Wu; Jun Zhou; Edwin Y. Pun
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Paper Abstract

High quality rectangular micro- to nanochannels with SiO2 shells have been fabricated by using optimized preparation parameters. Various dimensions of cross section of channels have been effectively controlled via the polymethyl methacrylate template as a suitable sacrificial layer in the processes of pattern formation and nanolithography. And, the fabricated channels have excellent shape uniformity, smooth inner surface, and vertical sidewalls along the longitudinal axis, which is confirmed by the good agreement between the experimental data and theoretical values of the mean filling speeds of liquids in the confined space. This technique exhibits the potential advantage for the controllable fabrication of various micro- to nanofluidic devices.

Paper Details

Date Published: 1 October 2011
PDF: 4 pages
J. Micro/Nanolith. MEMS MOEMS 10(4) 049701 doi: 10.1117/1.3665215
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 10, Issue 4
Show Author Affiliations
Yunqiao Wu, Ningbo Univ. (China)
Jun Zhou, Ningbo Univ. (China)
Edwin Y. Pun, City Univ. of Hong Kong (Hong Kong, China)

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