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Optical Engineering

Electroactive polymer-based spatial light modulator with high reliability and fast response speed
Author(s): Guangmin Ouyang; Kaiying Wang; Xuyuan Chen; Lars Henriksen
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Paper Abstract

An electroactive polymer (EAP)-based MOEMS spatial light modulator (SLM), which shows high reliability and fast response speed, is reported in this work. The reliability is achieved by designing the SLM without direct contact between electrodes and deformable EAP surface; while the fast response speed is obtained by optimizing the microstructure of the EAP material. The concept of SLM, material optimization approach, fabrication processes, as well as characterization methods, are described. The SLM is driven by relatively low voltage, which is 200 V dc and 60 V ac and the response time is 35 μs. The manufactured SLM shows no degradation or breakdown after millions of actuation cycles, indicating a good reliability of the device.

Paper Details

Date Published: 1 December 2011
PDF: 5 pages
Opt. Eng. 50(12) 124001 doi: 10.1117/1.3659216
Published in: Optical Engineering Volume 50, Issue 12
Show Author Affiliations
Guangmin Ouyang, Vestfold Univ. College (Norway)
Kaiying Wang, Vestfold Univ. College (Norway)
Xuyuan Chen, Vestfold Univ. College (Norway)
Lars Henriksen, poLight AS (Norway)

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