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Journal of Micro/Nanolithography, MEMS, and MOEMS

Lossless circuit layout image compression algorithm for maskless direct write lithography systems
Author(s): Jeehong Yang; Serap A. Savari
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Paper Abstract

The recent algorithm Corner is a transform-based technique to represent a circuit layout image for maskless direct write lithography systems. We improve the lossless circuit layout compression algorithm Corner so that 1. it requires fewer symbols during the corner transform, 2. it has a simpler and faster decoding process, while 3. it requires a similar amount of memory for the decoding process.

Paper Details

Date Published: 1 October 2011
PDF: 14 pages
J. Micro/Nanolith. 10(4) 043007 doi: 10.1117/1.3644620
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 10, Issue 4
Show Author Affiliations
Jeehong Yang, Univ. of Michigan (United States)
Serap A. Savari, Texas A&M Univ. (United States)


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