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Optical Engineering

Solar-blind photodetectors based on polycrystalline MgZnO thin films
Author(s): Gaoming Li; Jingwen Zhang; Ying Liu; Kunfeng Zhang
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Paper Abstract

Photoconductive metal-semiconductor-metal ultraviolet detectors were fabricated based on the polycrystalline MgZnO films, which were grown on SiO2/Si substrates by radio frequency magnetron sputtering. The peak response of the detector was at 300 nm, which lay in the solar-blind spectrum range (220 to 300 nm). And the peak responsivity was 34.02 A/W. The ratio of Iph/Id was as high as 2659.7 at 5 V bias under a low pressure Hg lamp illumination. And a rise time of 44.48 μs (90%) and fall time of 120.2 ms (10%) of the detector were acquired.

Paper Details

Date Published: 1 November 2011
PDF: 5 pages
Opt. Eng. 50(11) 113801 doi: 10.1117/1.3643722
Published in: Optical Engineering Volume 50, Issue 11
Show Author Affiliations
Gaoming Li, Xi'an Jiaotong Univ. (China)
Jingwen Zhang, Xi'an Jiaotong Univ. (China)
Ying Liu, Xi'an Jiaotong Univ. (China)
Kunfeng Zhang, Xi'an Jiaotong Univ. (China)


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