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Optical Engineering

Orientation identification of the power spectrum
Author(s): Maria E. Rudnaya; Robert M. Mattheij; Joseph M. Maubach; Hennie G. ter Morsche
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Paper Abstract

The image Fourier transform is widely used for defocus and astigmatism correction in electron microscopy. The shape of a power spectrum (the square of a modulus of image Fourier transform) is directly related to the three microscope controls, namely, defocus and twofold (two-parameter) astigmatism. We propose a new method for power-spectrum orientation identification. The method is based on the three measures that are related to the microscope's controls. The measures are derived from the mathematical moments of the power spectrum and is tested with the help of a Gaussian benchmark, as well as with the scanning electron microscopy experimental images. The method can be used as an assisting tool for increasing the capabilities of defocus and astigmatism correction a of nonexperienced scanning electron microscopy user, as well as a basis for automated application.

Paper Details

Date Published: 1 October 2011
PDF: 14 pages
Opt. Eng. 50(10) 103201 doi: 10.1117/1.3633333
Published in: Optical Engineering Volume 50, Issue 10
Show Author Affiliations
Maria E. Rudnaya, Technische Univ. Eindhoven (Netherlands)
Robert M. Mattheij, Technische Univ. Eindhoven (Netherlands)
Joseph M. Maubach, Technische Univ. Eindhoven (Netherlands)
Hennie G. ter Morsche, Technische Univ. Eindhoven (Netherlands)

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