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Optical Engineering

High diffraction order grating interferometer for pitch measurement
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Paper Abstract

A grating interferometer that uses the high diffraction orders in conjunction with a Twyman-Green commercial interferometer is used for the measurement of in plane movement of gratings. The high diffraction orders ensures the amplification of the measurement precision with a factor equal to the diffraction order of the measurement in principle, because no imaging of features marking the beginning and the end of the measured length feature is necessary, and therefore the resolution limits associated with microscope imaging are eliminated.

Paper Details

Date Published: 1 October 2011
PDF: 5 pages
Opt. Eng. 50(10) 105601 doi: 10.1117/1.3633332
Published in: Optical Engineering Volume 50, Issue 10
Show Author Affiliations
Dan Apostol, National Institute for Lasers, Plasma and Radiation Physics (Romania)
Cristian V. Udrea, National Institute for Lasers, Plasma and Radiation Physics (Romania)
Florin Garoi, National Institute for Lasers, Plasma and Radiation Physics (Romania)
Tiberius N. Vasile, National Institute for Lasers, Plasma and Radiation Physics (Romania)
Petre Catalin Logofatu, National Institute for Lasers, Plasma and Radiation Physics (Romania)


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