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Journal of Micro/Nanolithography, MEMS, and MOEMS

Fabrication of five-layer three-dimensional miniature SU-8 axial fans using ultraviolet lithography
Author(s): Hamed Keramati; Jianmin Miao; Weng Kong Chan
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Paper Abstract

As miniaturization technologies have improved for the past few decades, electronic devices are becoming smaller and the technology needed to fabricate complex three-dimensional (3D) microstructures becomes important. Photolithography is a relatively simple and low-cost method. However, photolithography is, in general, a fabrication method for planar two-dimensional microstructures. In this study, a technique using photolithography is developed to fabricate three-dimensional blades for axial microfan applications. Fabrication of a five-layer SU-8 microstructure for a miniature axial fan of 5 mm diameter using ultraviolet (UV) lithography is presented. Each SU-8 layer was fabricated with a small shift relative to the previous layer. Hence, 3D SU-8 blades with oblique sections have been successfully fabricated using this relatively simple UV lithography. A multiple resist coating and exposure with a single development stage was employed. It was observed that the exposure time for the second to fifth layers was reduced by a factor of 0.7 as compared to that needed for the first layer. A relatively efficient method for the fabrication of multilayer oblique walls was developed. It is probably the first time that UV lithography is used for creating 3D sloping microstructures.

Paper Details

Date Published: 1 July 2011
PDF: 7 pages
J. Micro/Nanolith. MEMS MOEMS 10(3) 033014 doi: 10.1117/1.3625606
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 10, Issue 3
Show Author Affiliations
Hamed Keramati, Nanyang Technological Univ. (Singapore)
Jianmin Miao, Nanyang Technological Univ. (Singapore)
Weng Kong Chan, Nanyang Technological Univ. (Singapore)

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