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Optical Engineering

Correction method for segmenting valid measuring region of interference fringe patterns
Author(s): Pengcheng Yang; Suping Fang; Leijie Wang; Lei Meng; Masaharu M. Komori; Aizoh Kubo
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Paper Abstract

Segmenting the valid measuring region from an interferogram is an important step in the grazing incidence interferometry, which is related to the accuracy of the measurement result. For the spurious fringes which are generated by the diffuse reflection of the chamfering in the edge of the object surface, we propose a method-spin segment to correct the result of the image segment. First, a phase schematic diagram whose stripe feature is clearer than the original interference fringe patterns is generated. Next, the difference of the gray gradient between the fringe's local normal direction and local tangent direction is calculated to judge the valid measurement region. The principles of selecting some parameters are summarized and the calculation steps are shown. To examine the correction method, the results of an experimental application of spin segment are given to verify the feasibility and accuracy.

Paper Details

Date Published: 1 September 2011
PDF: 7 pages
Opt. Eng. 50(9) 095602 doi: 10.1117/1.3622760
Published in: Optical Engineering Volume 50, Issue 9
Show Author Affiliations
Pengcheng Yang, Xi'an Jiaotong Univ. (China)
Suping Fang, Xi'an Jiaotong Univ. (China)
Leijie Wang, Xi'an Jiaotong Univ. (China)
Lei Meng, Xi'an Jiaotong Univ. (China)
Masaharu M. Komori, Kyoto Univ. (Japan)
Aizoh Kubo, Kyoto Univ. (Japan)


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