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Journal of Micro/Nanolithography, MEMS, and MOEMS

Optical position encoding and phase control of an electrostatically driven two-dimensional MOEMS scanner at two resonant modes
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Paper Abstract

We have developed compact devices to control electrostatically driven resonant micromirrors with one and two axes. For stable oscillation with large amplitude, operation close to resonance must be ensured under varying environmental conditions. Our devices feature optical position sensing and driver electronics with closed loop control. In this contribution, we present in much detail the novel two-dimensional device and highlight specific aspects of this system.

Paper Details

Date Published: 1 July 2011
PDF: 10 pages
J. Micro/Nanolith. MEMS MOEMS 10(3) 033006 doi: 10.1117/1.3609230
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 10, Issue 3
Show Author Affiliations
Andreas Tortschanoff, Carinthian Tech Research AG (Austria)
Albert Frank, Carinthian Tech Research AG (Austria)
Michael Wildenhain, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Thilo Sandner, Fraunhofer-Institut für Photonische Mikrosysteme (Germany)
Andreas Kenda, Carinthian Tech Research AG (Austria)

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