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Optical Engineering

Dynamic scan detection of focal spot on nonplanar surfaces: theoretical analysis and realization
Author(s): Jianbo Luo; Yiyong Liang; Guoguang Yang
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Paper Abstract

A new approach called dynamic-scan-detection is presented to detect the focal spot on nonplanar surfaces, which is a key technique for laser direct writing on nonplanar surfaces. From the depth response properties of a confocal system on a nonplanar surface, the approach scans the axial shift of intensity response peak by oscillating the modified pinhole in the axial direction, and demodulates the defocus by measuring the length of time between two peaks of measured intensity waveform in one period. Compared with conventional methods, this approach features easy implementation, wide depth measurement range without deterioration of the depth discrimination property, dynamically adjustable scan amplitude, and more importantly, suppression of common-mode noise or variable system factors.

Paper Details

Date Published: 1 July 2011
PDF: 8 pages
Opt. Eng. 50(7) 073601 doi: 10.1117/1.3597327
Published in: Optical Engineering Volume 50, Issue 7
Show Author Affiliations
Jianbo Luo, Zhejiang Univ. (China)
Yiyong Liang, Zhejiang Univ. (China)
Guoguang Yang, Zhejiang Univ. (China)

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