Share Email Print

Optical Engineering

High-speed optical beam alignment based on a motion control technique for three-dimensional microelectromechanical systems optical switch modules
Author(s): Masato Mizukami; Joji Yamaguchi; Naru Nemoto
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

For optical axis alignment when light deflection control of a MEMS mirror is done at high speed, we propose a method based on identifying the quadratic surface shape. The method uses information about the optical power monitored when the mirror is inclined to a small angle. It is shown that the search for maximum optical power is possible by using this method. We also designed a control system with a band-stop filter for resonance frequency to decrease residual vibration generated when the mirror is moved at high speed. We confirm that the searchable level of optical power can be improved.

Paper Details

Date Published: 1 July 2011
PDF: 5 pages
Opt. Eng. 50(7) 074001 doi: 10.1117/1.3594787
Published in: Optical Engineering Volume 50, Issue 7
Show Author Affiliations
Masato Mizukami, NTT Microsystem Integration Labs. (Japan)
Joji Yamaguchi, NTT Microsystem Integration Labs. (Japan)
Naru Nemoto, NTT Microsystem Integration Labs. (Japan)

© SPIE. Terms of Use
Back to Top