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Optical Engineering

High-speed optical beam alignment based on a motion control technique for three-dimensional microelectromechanical systems optical switch modules
Author(s): Masato Mizukami; Joji Yamaguchi; Naru Nemoto
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Paper Abstract

For optical axis alignment when light deflection control of a MEMS mirror is done at high speed, we propose a method based on identifying the quadratic surface shape. The method uses information about the optical power monitored when the mirror is inclined to a small angle. It is shown that the search for maximum optical power is possible by using this method. We also designed a control system with a band-stop filter for resonance frequency to decrease residual vibration generated when the mirror is moved at high speed. We confirm that the searchable level of optical power can be improved.

Paper Details

Date Published: 1 July 2011
PDF: 5 pages
Opt. Eng. 50(7) 074001 doi: 10.1117/1.3594787
Published in: Optical Engineering Volume 50, Issue 7
Show Author Affiliations
Masato Mizukami, NTT Microsystem Integration Labs. (Japan)
Joji Yamaguchi, NTT Microsystem Integration Labs. (Japan)
Naru Nemoto, NTT Microsystem Integration Labs. (Japan)


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