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Journal of Micro/Nanolithography, MEMS, and MOEMS

Photoelectrical response properties of a linear high-temperature superconducting sensor coupled with a refractive microlens array
Author(s): Xinyu Zhang; Hui Li; Kan Liu; Jun Luo; Chang-Sheng Xie; An Ji; Tianxu Zhang
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Paper Abstract

The photoelectrical response properties of a linear high-temperature (high-Tc) superconducting sensor coupled with a refractive microlens array are investigated. The theoretical analysis and measurements demonstrate that the photoelectrical response uniformity of superconducting sensors is not always improved simultaneously with the enhancement of the common photoelectrical performances of superconducting sensors, such as the responsivity, the noise equivalent power, and the detectivity, after coupling cylinder microlenses with them. A linear 8-pixel high-Tc YBa2Cu3O7-δ superconducting thin film sensor and a quartz microlens array of 32×64, are designed and then fabricated and finally coupled for detection infrared radiation in the wavelength range of 1 to 5 μm. The superconducting sensors are characterized through a common measurement method.

Paper Details

Date Published: 1 April 2011
PDF: 9 pages
J. Micro/Nanolith. 10(2) 023011 doi: 10.1117/1.3590939
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 10, Issue 2
Show Author Affiliations
Xinyu Zhang, Huazhong Univ. of Science and Technology (China)
Hui Li, Huazhong Univ. of Science and Technology (China)
Kan Liu, Huazhong Univ. of Science and Technology (China)
Jun Luo, Huazhong Univ. of Science and Technology (China)
Chang-Sheng Xie, Huazhong Univ. of Science and Technology (China)
An Ji, Institute of Semiconductors (China)
Tianxu Zhang, Huazhong Univ. of Science and Technology (China)


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