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Journal of Biomedical Optics

Feasibility study on bonding quality inspection of microfluidic devices by optical coherence tomography
Author(s): Shiguang Li; Zhiguang Xu; Soon Fatt Yoon; Zhong-ping Fang
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Paper Abstract

This paper reports the feasibility of optical coherence tomography (OCT) technology for inspection of bonding quality of microfluidic devices in manufacturing environments. A compact optical-fiber-based OCT is developed and its measurement performance is characterized. A series of microfluidic devices respectively bonded by adhesive tape, thermal method, and oxygen plasma, are inspected. The defects of geometry deformation and sealing completeness are emphasized during measurements. Based on the inspection results, some discoveries related to the production of microfluidic devices are discussed.

Paper Details

Date Published: 1 June 2011
PDF: 10 pages
J. Biomed. Opt. 16(6) 066011 doi: 10.1117/1.3590747
Published in: Journal of Biomedical Optics Volume 16, Issue 6
Show Author Affiliations
Shiguang Li, Singapore-MIT Alliance (Singapore)
Zhiguang Xu, Singapore-MIT Alliance (Singapore)
Soon Fatt Yoon, Nanyang Technological Univ. (Singapore)
Zhong-ping Fang, A*STAR Singapore Institute of Manufacturing Technology (Singapore)

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