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Optical Engineering

Microelectromechanical systems surface characterization based on white light phase shifting interferometry
Author(s): Tong Guo; Long Ma; Jinping Chen; Xing Fu; Xiaotang Hu
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Paper Abstract

This paper describes a new peak detecting algorithm combined Carré phase shifting interferometry with white light interferometry. The new method can carry the fast, accurate, and noncontact measurements. The testing system employs a Mirau objective on a piezoelectric transducer based on a Zeiss microscope. Several numerical simulations are first carried to analyze its phase calculation errors due to the visibility variation in the white light correlogram. Afterwards, the centroid method is adopted to concentrate the phase extraction on the zero-order fringe, which not only decreases the phase error, but also frees the data processing from the phase unwrapping procedure. The capabilities of the system and the proposed algorithm are evaluated through the measurements of a microresonator and two standard step heights. In the measurement of the 44-nm standard step height, no overshoot shows up on or close to the edge of the sample. At last, three different methods include: white light phase shifting interferometry, phase shifting interferometry and white light interferometry are employed to make a comparison on the measurement precision.

Paper Details

Date Published: 1 May 2011
PDF: 8 pages
Opt. Eng. 50(5) 053606 doi: 10.1117/1.3577694
Published in: Optical Engineering Volume 50, Issue 5
Show Author Affiliations
Tong Guo, Tianjin Univ. (China)
Long Ma, Tianjin Univ. (China)
Jinping Chen, Tiajin Univ. (China)
Xing Fu, Tianjin Univ. (China)
Xiaotang Hu, Tianjin Univ. (China)

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