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Optical Engineering

Resolution improvement of femtosecond laser induced two-photon polymerization based on phase filtering
Author(s): Xiang Wang; Jijun He; Jianqiang Ma; Junjun Ding; Jiaru Chu; Wenhao Huang
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Paper Abstract

Femtosecond laser induced two-photon polymerization has the advantages of high resolution and capability of true three-dimensional (3D) fabrication. In this work, a phase filter-based super-resolution technique was adopted to reduce the size of focus spot in order to achieve exceeded diffraction limit fabrication resolution. The principle of phase modulation of a femtosecond laser was introduced, the parameters of the phase filter were optimized using a genetic algorithm, and then a 3D super-resolution annular phase filter was fabricated. Experimental results proved that the aspect ratio as well as the axial and radial sizes of solidified units was compressed by the optimized phase filter. A maximum aspect ratio compression ratio of 20.8% was achieved. The radial compression ratio of the modulated spot decreased with the increase of laser exposure amount, while the axial compression ratio and aspect ratio compression ratio increased.

Paper Details

Date Published: 1 May 2011
PDF: 7 pages
Opt. Eng. 50(5) 054302 doi: 10.1117/1.3574769
Published in: Optical Engineering Volume 50, Issue 5
Show Author Affiliations
Xiang Wang, Univ. of Science and Technology of China (China)
Jijun He, Univ. of Science and Technology of China (China)
Jianqiang Ma, Univ. of Science and Technology of China (China)
Junjun Ding, Univ. of Science and Technology of China (China)
Jiaru Chu, Univ. of Science and Technology of China (China)
Wenhao Huang, Univ. of Science and Technology of China (China)

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