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Optical Engineering

High-speed inline profiler using a modified Fourier transform method for measuring integrated circuit surface profiles
Author(s): Takeshi Nakazawa; José Sasián; Francy K. Abraham
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Paper Abstract

We propose a high-speed surface profiler using a modified Fourier transform profilometry (FTP) approach. Our system geometry is different from a conventional profiler in that the fringe-projection lens and the imaging lens are at different heights from a reference plane. FTP computer simulation and experimental data are provided that supports our theoretical development. Our profiler provides a 1σ rms error of about 4 μm for an integrated circuit chip sample in an area of 14 mm × 6.5 mm with a 0.13 second data acquisition time. It is shown that our theoretical derivation is suitable for a micrometer scale object measurement.

Paper Details

Date Published: 1 May 2011
PDF: 8 pages
Opt. Eng. 50(5) 053603 doi: 10.1117/1.3574399
Published in: Optical Engineering Volume 50, Issue 5
Show Author Affiliations
Takeshi Nakazawa, College of Optical Sciences, The Univ. of Arizona (United States)
José Sasián, College of Optical Sciences, The Univ. of Arizona (United States)
Francy K. Abraham, Intel Corp. (United States)


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