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Optical Engineering

Measurement of nano/micro out-of-plane and in-plane displacements of micromechanical components by using digital holography and speckle interferometry
Author(s): Giancarlo Pedrini; Igor Alekseenko; Wolfgang Osten; Joao Gaspar; Marek E. Schmidt; Oliver Paul
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Paper Abstract

Optical techniques are well suited for the measurement of microcomponents but give accurate results only when calibrated systems are used. We present a strategy for the calibration of setups to be used for the measurements of microsystems. We develop, at first, standard reference devices whose out-of-plane and in-plane displacements are precisely reproducible when submitted to standard loadings. These reference devices have been manufactured and tested by optical techniques and may be used for the calibration of optical measuring systems. Furthermore, a detailed discussion of the measurement uncertainty, according to the ISO's "Guide of Expression of Uncertainty in Measurement," is given.

Paper Details

Date Published: 1 October 2011
PDF: 11 pages
Opt. Eng. 50(10) 101504 doi: 10.1117/1.3572186
Published in: Optical Engineering Volume 50, Issue 10
Show Author Affiliations
Giancarlo Pedrini, Univ. Stuttgart (Germany)
Igor Alekseenko, Univ. Stuttgart (Germany)
Wolfgang Osten, Univ. Stuttgart (Germany)
Joao Gaspar, Albert-Ludwigs-Univ. Freiburg (Germany)
Marek E. Schmidt, Albert-Ludwigs-Univ. Freiburg (Germany)
Oliver Paul, Albert-Ludwigs-Univ. Freiburg (Germany)

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