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Journal of Biomedical Optics • Open Access

Miniature endoscopic optical coherence tomography probe employing a two-axis microelectromechanical scanning mirror with through-silicon vias
Author(s): Lin Liu; Jingjing Sun; Elaine Lin; Huikai Xie; Lei Wu

Paper Abstract

We present the design and experimental results of a new MEMS-based endoscopic optical coherence tomography (OCT) probe. The uniqueness of this miniature OCT imaging probe is a two-axis MEMS mirror with through-silicon vias (TSVs) for interconnecting. The TSV interconnection enables ultracompact probe design, successfully reducing the probe size to only 2.6 mm in diameter. The MEMS mirror is actuated by an electrothermal actuator that is capable of scanning ±16° at only 3.6 V DC. Two-dimensional and three-dimensional OCT images of microspheres embedded in PDMS and acute rat brain tissue have been obtained with this miniature probe in a time-domain OCT system.

Paper Details

Date Published: 1 February 2011
PDF: 4 pages
J. Biomed. Opt. 16(2) 026006 doi: 10.1117/1.3533323
Published in: Journal of Biomedical Optics Volume 16, Issue 2
Show Author Affiliations
Lin Liu, Univ. of Florida (United States)
Jingjing Sun, Univ. of Florida (United States)
Elaine Lin, Univ. of Florida (United States)
Huikai Xie, Univ. of Florida (United States)
Lei Wu, WiOptix, Inc. (United States)

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