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Journal of Micro/Nanolithography, MEMS, and MOEMS

Molybdenum-doped zinc oxide nanocomposite transparent film derived by sputtering technique
Author(s): Po-Tsung Hsieh; Tao-Hsing Chen; Chao-Yu Huang; Ji-Quan Wang; Ricky-Wenkuei Chuang
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Paper Abstract

A molybdenum (Mo)-doped zinc oxide thin film is deposited on a glass substrate by a rf magnetron sputtering technique. The structural and optical characteristics of ZnO:Mo (ZMO) thin films prepared with various deposition parameters are investigated. A series of SEM images obtained reveal that the average grain size of ZMO thin films is small and uniform. Energy dispersive spectroscopy analysis also verifies that traces of Mo are present in the as-grown thin films. The thicknesses of these ZMO films ranging from 150 to 390 nm are obtained by varying pertinent sputtering parameters. The average transmittance of ZMO thin films measured is more than 80% in the visible spectrum.

Paper Details

Date Published: 1 October 2010
PDF: 5 pages
J. Micro/Nanolith. 9(4) 043004 doi: 10.1117/1.3514706
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 9, Issue 4
Show Author Affiliations
Po-Tsung Hsieh, National Cheng Kung Univ. (Taiwan)
Tao-Hsing Chen, National Kaohsiung Univ. of Applied Sciences (Taiwan)
Chao-Yu Huang, National Cheng Kung Univ. (Taiwan)
Ji-Quan Wang, National Cheng Kung Univ. (Taiwan)
Ricky-Wenkuei Chuang, National Cheng Kung Univ. (Taiwan)


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