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Journal of Micro/Nanolithography, MEMS, and MOEMS

Characterization of gold/gold, gold/ruthenium, and ruthenium/ruthenium ohmic contacts in MEMS switches improved by a novel methodology
Author(s): Adrien A. B. Broué; Jérémie Dhennin; Frédéric Courtade; Christel Dieppedal; Patrick Pons; Xavier Lafontan; Robert Plana
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Paper Abstract

Comparisons between several pairs of contact materials are done with a new methodology using a commercial nanoindenter coupled with electrical measurements on test vehicles specially designed to investigate microscale contact physics. Experimental measurements are obtained to characterize the response of a 5-µm2-square contact bump under electromechanical stress with increased applied current. The data provide a better understanding of microcontact behavior related to the impact of current at low- to medium-power levels. Contact temperature rise is observed, leading to shifts of the mechanical properties of contact materials and modifications of the contact surface. The stability of the contact resistance, when the contact force increases, is studied for contact pairs of soft (Au/Au contact), harder (Ru/Ru contact), and mixed material configuration (Au/Ru contact). An enhanced stability of the bimetallic contact Au/Ru is demonstrated, considering sensitivity to power increase related to creep effects and topological modifications of the contact surfaces. These results are compared to previous ones and discussed in a theoretical way by considering the temperature distribution around the hottest area at the contact interface.

Paper Details

Date Published: 1 October 2010
PDF: 8 pages
J. Micro/Nanolith. 9(4) 041102 doi: 10.1117/1.3504663
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 9, Issue 4
Show Author Affiliations
Adrien A. B. Broué, Lab. d'Analyse et d'Architecture des Systèmes (France)
Jérémie Dhennin, NOVA MEMS (France)
Frédéric Courtade, Ctr. National d'Études Spatiales (France)
Christel Dieppedal, Lab. d'Electronique de Technologie de l'Information (France)
Patrick Pons, Lab. d'Analyse et d'Architecture des Systèmes (France)
Xavier Lafontan, Ctr. National d'Études Spatiales (France)
Robert Plana, Lab. d'Analyse et d'Architecture des Systèmes (France)


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