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Journal of Micro/Nanolithography, MEMS, and MOEMS

Design, manufacturing, and qualification of an uncooled microbolometer focal plane array-based radiometric package for space applications
Author(s): Sonia M. García-Blanco; Patrice Côté; Melanie R. Leclerc; Nathalie Blanchard; Yan Desroches; Jean-Sol Caron; Linh Ngo Phong; François Châteauneuf; Timothy D. Pope
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Paper Abstract

Uncooled microbolometer detectors are well suited for space applications due to their low power consumption while still exhibiting adequate performance. Furthermore, the spectral range of their response could be tuned from the mid- to the far-infrared to meet different mission requirements. If radiometric measurements are required, the radiometric error induced by variation of the temperature of the detector environment must be minimized. In a radiometric package, the detector environment is thermally stabilized by means of a temperature-controlled radiation shield. The radiation shield must be designed to prevent stray radiation from reaching the detector. A radiometric packaging technology for uncooled microbolometer FPAs is presented. The selection of materials is discussed and the final choices presented based on thermal simulations and experimental data. The radiometric stability with respect to stray light and variation of the temperature of the environment as well as the different noise components studied by means of the Allan variance are presented. It is also shown that the device successfully passed the prescribed environmental tests without degradation of performance.

Paper Details

Date Published: 1 November 2010
PDF: 13 pages
J. Micro/Nanolith. MEMS MOEMS 9(4) 041105 doi: 10.1117/1.3492413
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 9, Issue 4
Show Author Affiliations
Sonia M. García-Blanco, INO (Canada)
Patrice Côté, INO (Canada)
Melanie R. Leclerc, INO (Canada)
Nathalie Blanchard, INO (Canada)
Yan Desroches, INO (Canada)
Jean-Sol Caron, INO (Canada)
Linh Ngo Phong, Canadian Space Agency (Canada)
François Châteauneuf, INO (Canada)
Timothy D. Pope, INO (Canada)

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