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Journal of Micro/Nanolithography, MEMS, and MOEMS

Engineered low-dimensional nanomaterials for sensors, actuators, and electronics
Author(s): Eui-Hyeok Yang
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Paper Abstract

We present an overview of our research on nanoelectronics and nanomechanics based on low-dimensional materials, including carbon nanotubes and graphene. Our primary research focus is on carbon nanotube and graphene architectures for electronics, energy harvesting, and sensing applications. We are also investigating an atomically precise graphene nanomachining method as well as a high-throughput desktop nanolithography process. In addition, we are exploiting nanomechanical actuators and nanoscale measurement techniques for reconfigurable arrayed nanostructures with applications in THz antennas, remote detectors, and biomedical nanorobots. Last, we are studying the effect of antibody functionalized nickel nanowires to improve cell separation techniques. These design, nanofabrication, manipulation, and characterization processes will enable next-generation nanoelectronics that have a wide range of applications including sensors, detectors, system-on-a-chip, system-in-a-package, programmable logic controls, energy storage systems, and all-electronic systems.

Paper Details

Date Published: 1 October 2010
PDF: 5 pages
J. Micro/Nanolith. 9(4) 041103 doi: 10.1117/1.3492411
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 9, Issue 4
Show Author Affiliations
Eui-Hyeok Yang, Stevens Institute of Technology (United States)


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