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Journal of Nanophotonics • Open Access

Commentary: Nano- and micromachining using laser plasma soft X-rays
Author(s): Tetsuya Makimura; Shuichi Torii; Hiroyuki Niino; Kouichi Murakami

Paper Details

Date Published: 1 August 2010
PDF: 5 pages
J. Nanophoton. 4(1) 040305 doi: 10.1117/1.3488615
Published in: Journal of Nanophotonics Volume 4, Issue 1
Show Author Affiliations
Tetsuya Makimura, Univ. of Tsukuba (Japan)
Shuichi Torii, Univ. of Tsukuba (Japan)
Hiroyuki Niino, National Institute of Advanced Industrial Science and Technology (Japan)
Kouichi Murakami, Univ. of Tsukuba (Japan)


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