Share Email Print
cover

Journal of Micro/Nanolithography, MEMS, and MOEMS

Novel fabrication method of corrugated long-period fiber gratings by thick SU-8 photoresist and wet-etching technique
Author(s): Chia-Chin Chiang; Hao-Jhen Chang; Jin-Shun Kuo
Format Member Price Non-Member Price
PDF $20.00 $25.00

Paper Abstract

A novel fabrication method for corrugated long-period fiber gratings (CLPFG) is presented in this study. The patterned SU-8 photoresist is used as a double-side stopper layer for a wet-etching process to fabricate the CLPFG. Presented in this research are four types of CLPFG with periods of 660, 670, 680, and 690 µm and resonant wavelengths of 1531, 1539, 1550, and 1558 nm, respectively. The maximum resonance loss of the CLPFG with a 680-µm period is 23 dB. The CLPFG fabricated in this study is demonstrated for temperature sensing, and the results illustrate that the fabricated CLPFG with a 680-µm period has a temperature sensitivity of 58.4 pm/°C, a wavelength-shifting linearity of R2=0.994, and a 0.856 °C resolution.

Paper Details

Date Published: 1 July 2010
PDF: 6 pages
J. Micro/Nanolith. MEMS MOEMS 9(3) 033007 doi: 10.1117/1.3478238
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 9, Issue 3
Show Author Affiliations
Chia-Chin Chiang, National Kaohsiung Univ. of Applied Sciences (Taiwan)
Hao-Jhen Chang, National Kaohsiung Univ. of Applied Sciences (Taiwan)
Jin-Shun Kuo, Sunonwealth Electric Machine Industry Co., Ltd. (Taiwan)


© SPIE. Terms of Use
Back to Top