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Journal of Micro/Nanolithography, MEMS, and MOEMS

Analysis of a diffractive microlens using the finite-difference time-domain method
Author(s): Yuling Liu; Hua Liu
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Paper Abstract

The finite-difference time-domain (FDTD) method is used as rigorous electromagnetic analysis model to calculate the field for a diffractive microlens (DML). The FDTD is used for the entire solution rather than using a near- to far-field propagation method to obtain the far-field energy distribution; thus, all the results are vector based. We derived a formula to calculate the magnitude of electric field, which is time dependent and can be used to graphically show the light wave propagation and focusing process through a DML. Both the comparison and the integral methods are presented to obtain wave amplitude in full solution space, and the distribution of light energy behind a DML is illustrated based on the wave amplitude. The formula of diffractive efficiency of the DML is derived from a time-averaged Ponyting vector, which can indicate the propagation direction of light energy. Application of these formulations in the analysis of a DML example demonstrates the high accuracy and efficiency of our method.

Paper Details

Date Published: 1 July 2010
PDF: 6 pages
J. Micro/Nanolith. MEMS MOEMS 9(3) 033004 doi: 10.1117/1.3469817
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 9, Issue 3
Show Author Affiliations
Yuling Liu, Zhejiang Univ. (China)
Hua Liu, Changchun Institute of Optics, Fine Mechanics and Physics (China)

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