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Optical Engineering

Design and fabrication of a pyramid wavefront sensor
Author(s): Aina Wang; Jun Yao; Dongmei Cai; Hao Ren
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Paper Abstract

A new pyramid wavefront sensor (PWFS), which utilizes a reflective pyramid mirror instead of a refractive pyramid prism at the focus of a telescope, is presented. As a key optical component in this PWFS, the pyramid mirror requires accurate microfabrication for excellent quality of the tip, the turned edges, and the surfaces. The moving mask lithography process is proposed for its economic, simple, and precise control to make the cross-sectional shape of the structure. The completed pyramid mirror has a square base of 1-mm length and four side facets inclined to the base at 3.7 deg. The sizes of the pyramid tip and turned edges are both about 6 µm, which show excellent aspects of sharpening-tip and knife-edges. The root mean square of four facets is approximately 70 nm, and the maximum profile deviation is 0.2 µm.

Paper Details

Date Published: 1 July 2010
PDF: 5 pages
Opt. Eng. 49(7) 073401 doi: 10.1117/1.3461956
Published in: Optical Engineering Volume 49, Issue 7
Show Author Affiliations
Aina Wang, Institute of Optics and Electronics (China)
Jun Yao, Institute of Optics and Electronics (China)
Dongmei Cai, Institute of Optics and Electronics (China)
Hao Ren, Institute of Optics and Electronics (China)

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