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Journal of Micro/Nanolithography, MEMS, and MOEMS

Characterization of ZnO films of surface acoustic-wave oscillators for ultraviolet sensing applications
Author(s): Ching-Liang Wei; Ying-Chung Chen; Kuo-Sheng Kao; Kuang-Tsung Wu; Da-Long Cheng; Po-Tsung Hsieh
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Paper Abstract

A UV sensor composed of a surface acoustic wave (SAW) device and a high-frequency amplifier was constructed using a Colpitts oscillator circuit. Zinc oxide (ZnO) films of SAW devices were prepared on lithium niobate substrates with various deposition temperatures to investigate their effect on the sensitivity of UV sensors. Larger grain sizes and a better chemical composition of the ZnO films were obtained at high-deposition temperatures rather than at low-deposition temperatures. An extreme frequency shift of 264 kHz and sensitivity of 0.21 kHz/(µW/cm2) were obtained for the ZnO-based SAW oscillator at the deposition temperature of 400 °C.

Paper Details

PDF: 6 pages
J. Micro/Nanolith. 9(3) 031009 doi: 10.1117/1.3459938
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 9, Issue 3, July 2010
Show Author Affiliations
Ching-Liang Wei, National Sun Yat-Sen Univ. (Taiwan)
Ying-Chung Chen, National Sun Yat-Sen Univ. (Taiwan)
Kuo-Sheng Kao, Shu-Te Univ. (Taiwan)
Kuang-Tsung Wu, Shu-Te Univ. (Taiwan)
Da-Long Cheng, Shu-Te Univ. (Taiwan)
Po-Tsung Hsieh, National Cheng Kung Univ. (Taiwan)

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