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Journal of Micro/Nanolithography, MEMS, and MOEMS

Three-dimensional flexible microprobe for recording the neural signal
Author(s): Chang-Hsiao Chen; Shih-Chang Chuang; Yu-Tao Lee; Yen-Chung Chang; Shih-Rung Yeh; Da-Jeng Yao
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Paper Abstract

We have designed, fabricated, and tested a novel three-dimensional (3-D) flexible microprobe used for recording the neural signals of lateral giant (LG) on the escape system of American crayfish. We report an electrostatic actuation process to fold the planar probes to be the arbitrary orientations of 3-D probes for neuroscience application. The batch assembly method based on electrostatic force techniques gave more simple fabrication compared to others. A flexible probe could reduce both the chronic inflammation response and material fracture when animal breathes or moves. Furthermore, the cortex corresponds to hypothetical cortical modules with mostly vertically organized layers of neurons. Therefore, the 3-D flexible probe suits to understand how the cooperative activity for different layers of neurons. Advisedly, we present a novel fabrication for the 3-D flexible probe by using Parylene technology. The mechanical strength of the neural probe is strong enough to penetrate into a biogel. At the end, the flexible probe was used to record neural signals of the LG cell from American crayfish.

Paper Details

Date Published: 1 July 2010
PDF: 6 pages
J. Micro/Nanolith. MEMS MOEMS 9(3) 031007 doi: 10.1117/1.3455409
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 9, Issue 3
Show Author Affiliations
Chang-Hsiao Chen, National Tsing Hua Univ. (Taiwan)
Shih-Chang Chuang, National Tsing Hua Univ. (Taiwan)
Yu-Tao Lee, National Tsing Hua Univ. (Taiwan)
Yen-Chung Chang, National Tsing Hua Univ. (Taiwan)
Shih-Rung Yeh, National Tsing Hua Univ. (Taiwan)
Da-Jeng Yao, National Tsing Hua Univ. (Taiwan)

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