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Journal of Micro/Nanolithography, MEMS, and MOEMS

Comparison of different metal film thicknesses of cyclic olefin copolymer−substrate polymerase chain-reaction chips with single-side and double-side heaters
Author(s): Yung-Chiang Chung; Li-Wei Lai; Lung-Jieh Yang; Wei-Jie Liao
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Paper Abstract

The polymerase chain reaction (PCR) chips of different metal film thicknesses were fabricated, and the PCR machine with/without a top heater and the single-side/double-side heater PCR chips were compared. Before fabricating the chips, one simulated the effect of various thin-film thicknesses and the temperature distributions of various powers, and it helped one to find the optimum parameters. The total substrate material was cyclic olefin copolymers, and the gold film was fabricated on the substrate by evaporation. The results after PCR for the deoxyri bonucleic acid (DNA) of an Escherichia coli TG-1 cell were obtained. The results of the DNA amplifying 225 bps were 0.84-0.92 ng/µl, and these were 78-85% of the result of PCR machine with a top heater. There was no PCR product in the PCR machine without a top heater and single-side PCR chip. The thermal deformation temperature, thermal conductivity, and substrate thickness are the important parameters in a polymer substrate PCR chip, and the thermal deformation temperature is the key parameter.

Paper Details

Date Published: 1 July 2010
PDF: 7 pages
J. Micro/Nanolith. MEMS MOEMS 9(3) 031006 doi: 10.1117/1.3455371
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 9, Issue 3
Show Author Affiliations
Yung-Chiang Chung, Ming Chi Univ. of Technology (Taiwan)
Li-Wei Lai, Ming Chi Univ. of Technology (Taiwan)
Lung-Jieh Yang, Tamkang Univ. (Taiwan)
Wei-Jie Liao, Ming Chi Univ. of Technology (Taiwan)

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