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Journal of Micro/Nanolithography, MEMS, and MOEMS

Uncooled infrared detection with two-color microbolometers using a micro-optoelectromechanical systems tunable micromirror
Author(s): Yuguang Gong; Wei Li; Hai-Hong Cai; Zhi Li; Chao Chen; Ya-Dong Jiang
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Paper Abstract

A tunable reflecting micro-optoelectromechanical systems (MOEMS) micromirror is designed for measuring the actual temperature and color of an object based on comparison of two wavelength response windows, 3-5 and 8-12 µm. The MOEMS micromirror with switching between two positions by an applied electrostatic voltage provides a response to two wavelength windows by tuning the optical resonant cavity. Three different structural models of the tunable micromirror, which are made up of single Al layer with type I legs, single Al layer with type L legs, and double Al/Si3N4 layers with type I legs, are designed and simulated accurately using ANSYS tools on a 35-µm pixel-pitch array. On the basis of the comparsion, the third model, made up of double Al/Si3N4 layers with type I legs, is chosen. With different distances between the MOEMS micromirror and the bottom electrode, the total capacitance of the tunable micromirror is gained based on electromagnetic analysis and theoretical equation. The pull-in voltage is calculated as 8.21 V by electrostatic-mechanical coupling analysis, and the maximum stress is 368.744 MPa, which is less than the yield strength of Si3N4 thin film. But if the voltage is increased to ~9.73 V, the micromirror will touch the bottom electrode by pull-in behavior.

Paper Details

Date Published: 1 July 2010
PDF: 11 pages
J. Micro/Nanolith. MEMS MOEMS 9(3) 031005 doi: 10.1117/1.3455343
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 9, Issue 3
Show Author Affiliations
Yuguang Gong, Univ. of Electronic Science and Technology of China (China)
Wei Li, Univ. of Electronic Science and Technology of China (China)
Hai-Hong Cai, Univ. of Science and Technology of China (China)
Zhi Li, Univ. of Electronic Science and Technology of China (China)
Chao Chen, Univ. of Electronic Science and Technology of China (China)
Ya-Dong Jiang, Univ. of Electronic Science and Technology of China (China)


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