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Journal of Micro/Nanolithography, MEMS, and MOEMS

SU-8 rib waveguide Bragg grating filter using composite stamp and solvent-assisted microcontact molding technique
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Paper Abstract

We present a simple fabrication technique using a hydrophobic composite elastomer for patterning an SU-8-based rib waveguide Bragg grating filter via solvent-assisted microcontact molding (SAMIM). The proposed technique utilizes a two-layered composite stamp made of polydimethylsiloxane and hard polydimethylsiloxane, which enables both the rib waveguide and surface relief grating structure to be patterned simultaneously. The SAMIM method realizes patterning at ambient temperatures with the weight of the mold applying all the pressure necessary. By allowing the mold to absorb solvent when in contact with the polymer, the solvent dissolves or swells the polymer's surface, creating the desired pattern. This composite mold successfully demonstrates the SAMIM creation of the SU-8 rib waveguide and gratings, paving the way for a facile and efficient reproduction of a polymeric rib waveguide grating filter. Based on experimental results, the stamp demonstrates an operational life span in excess of 10 successful replications, utilizing a Bragg grating test pattern with a grating period of ~492 nm, a depth of ~250 nm, and a total length of 12 mm. The resulting waveguides show a band-rejection gain of −17 dB at the center wavelength of 1545 nm and a 3-dB bandwidth of 2.5 nm.

Paper Details

Date Published: 1 April 2010
PDF: 6 pages
J. Micro/Nanolith. 9(2) 023013 doi: 10.1117/1.3453671
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 9, Issue 2
Show Author Affiliations
Cheng-Sheng Huang, Univ. of Washington (United States)
Yue-Bun Pun, City Univ. of Hong Kong (Hong Kong, China)
Wei-Chih Wang, Univ. of Washington (United States)


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